Sifat Optik dan Energi Gap Film Ferroelektrik LiTaSiO5 di Atas Substrat Silikon
Abstract
Lithium tantalate silicate (LiTaSiO5) has successfully been made on Si (100) p-type and Si (111) n-type by chemical solution deposition (CSD) technique with temperatures variation of 600, 650, 700, 750, and 800 oC. Determined the film thickness as well as and test the optical properties with UV-Vis spectroscopy. The maximum absorbance of the substrates were 420 and 980 nm. The maximum band of films on Si (100) was 2.94 eV a temperature of 650 oC and Si (111) was 3.06 eV a temperature of 800 oCDownloads
References
Gonzalez AHM, Simoes AZ, Zaghete MA, Varela JA. 2003. Effect of preannealing on the morphology of LiTaO3 thin films prepared from the polymeric precursor method. Materials Characterization. 50(2-3): 233-238. http://doi.org/bfzvkt
Iriani Y, Hikam M, Irzaman. 2005. Analisa Struktur Kristal dan Komposisi Tipis Ba0,5Sr0,5TiO3 yang disiapkan dengan spin coating – 3th. Kentingan Physics Forum. 125-127.
Irzaman, Darvina Y, Fuad A, Arifin P, Budiman M, Barmawi M. 2003. Physical and pyroelectric properties of tantalum oxide doped lead zirconium titanate [Pb0.9950(Zr0.525 Ti0.465 Ta0.010)O3] thin films and its applications for IR sensor. Physica Status Solidi (a). 199(3): 416-424. http://doi.org/bv9jgw
Irzaman, Maddu A, Syafutra H, Ismangil A. 2010. Uji konduktivitas listrik dan dielektrik film tipis lithium tantalate (LiTaO3) yang didadah niobium pentaoksida (Nb2O5) menggunakan metode chemical solution deposition. Di dalam: prosiding seminar nasional fisika. hlm 175-183.
Irzaman, Syafutra H, Rancasa E, Nuayi AW, Rahman TbGN, Nuzulia NA, Supu I, Sugianto, Tummimomor F, Surianty, Muzikarno O, Masrur. 2013. The Effect of Ba/Sr ratio on Electrical and Optical Properties of Bax Sr(1-x) TiO3(x = 0,25; 0,35; 0,45; 0,55) Thin Film Semiconductor. Ferroelectrics. 445(1): 4-17. http://doi.org/bqhx
Irzaman, Pebriyanto Y, Apipah ER, Noor I, Alkadri A. 2015. Characterization of Optical and Structural of Lanthanum Doped LiTaO3 Thin Films. Integrated Ferroelectrics. 167(1): 137-145. http://doi.org/bqhz
Ismangil A, Jenie RP, Irmansyah, Irzaman. 2015. Development of lithium tantalite (LiTaO3) for automatic switch on LAPAN-IPB satelite infra-red sensor. Procedia Enviromental Sciences. 24: 329-334. http://doi.org/bqh2
Seo YJ, Park SW. 2004. Chemical Mechanical Planarization Characteristic of Ferroelectric Film for FRAM Applications. Journal of Korean Physics society. 45(3): 769-772.
Setiawan A. 2008. Uji sifat listrik dan optik BST yang didadah niobium (BSNT) ditumbuhkan di atas substrat Si (100) tipe-p dan gelas corning dengan penerapannya sebagai fotodiode. [Skripsi]. Bogor (ID): Institut Pertanian Bogor.
Smallman R, Bishop R. 1999. Modern Physics Metallurgy and Materials Engineering. Oxford (GB): Butterworth-Heinemann.
Yan T, Zheng F, Yu Y, Qin S, Liu H, Wang J, Yu D. 2011. Formation mechanism of black LiTaO3 single crystal through chemical reduction. Journal of Applied Crystallography. 44(1): 158-162. http://doi.org/fqfbp3
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