Sifat Optik dan Energi Gap Film Ferroelektrik LiTaSiO5 di Atas Substrat Silikon

La Isa, . Irmansyah, . Irzaman

Abstract


Lithium tantalate silicate (LiTaSiO5) has successfully been made on Si (100) p-type and Si (111) n-type by chemical solution deposition (CSD) technique with temperatures variation of 600, 650, 700, 750, and 800 oC. Determined the film thickness as well as and test the optical properties with UV-Vis spectroscopy. The maximum absorbance of the substrates were 420 and 980 nm. The maximum band of films on Si (100) was 2.94 eV a temperature of 650 oC and Si (111) was 3.06 eV a temperature of 800 oC

Keywords


bandgap energy; lithium tantalate silicate thin film; optical properties

Full Text:

PDF

References


Gonzalez AHM, Simoes AZ, Zaghete MA, Varela JA. 2003. Effect of preannealing on the morphology of LiTaO3 thin films prepared from the polymeric precursor method. Materials Characterization. 50(2-3): 233-238. http://doi.org/bfzvkt

Iriani Y, Hikam M, Irzaman. 2005. Analisa Struktur Kristal dan Komposisi Tipis Ba0,5Sr0,5TiO3 yang disiapkan dengan spin coating – 3th. Kentingan Physics Forum. 125-127.

Irzaman, Darvina Y, Fuad A, Arifin P, Budiman M, Barmawi M. 2003. Physical and pyroelectric properties of tantalum oxide doped lead zirconium titanate [Pb0.9950(Zr0.525 Ti0.465 Ta0.010)O3] thin films and its applications for IR sensor. Physica Status Solidi (a). 199(3): 416-424. http://doi.org/bv9jgw

Irzaman, Maddu A, Syafutra H, Ismangil A. 2010. Uji konduktivitas listrik dan dielektrik film tipis lithium tantalate (LiTaO3) yang didadah niobium pentaoksida (Nb2O5) menggunakan metode chemical solution deposition. Di dalam: prosiding seminar nasional fisika. hlm 175-183.

Irzaman, Syafutra H, Rancasa E, Nuayi AW, Rahman TbGN, Nuzulia NA, Supu I, Sugianto, Tummimomor F, Surianty, Muzikarno O, Masrur. 2013. The Effect of Ba/Sr ratio on Electrical and Optical Properties of Bax Sr(1-x) TiO3(x = 0,25; 0,35; 0,45; 0,55) Thin Film Semiconductor. Ferroelectrics. 445(1): 4-17. http://doi.org/bqhx

Irzaman, Pebriyanto Y, Apipah ER, Noor I, Alkadri A. 2015. Characterization of Optical and Structural of Lanthanum Doped LiTaO3 Thin Films. Integrated Ferroelectrics. 167(1): 137-145. http://doi.org/bqhz

Ismangil A, Jenie RP, Irmansyah, Irzaman. 2015. Development of lithium tantalite (LiTaO3) for automatic switch on LAPAN-IPB satelite infra-red sensor. Procedia Enviromental Sciences. 24: 329-334. http://doi.org/bqh2

Seo YJ, Park SW. 2004. Chemical Mechanical Planarization Characteristic of Ferroelectric Film for FRAM Applications. Journal of Korean Physics society. 45(3): 769-772.

Setiawan A. 2008. Uji sifat listrik dan optik BST yang didadah niobium (BSNT) ditumbuhkan di atas substrat Si (100) tipe-p dan gelas corning dengan penerapannya sebagai fotodiode. [Skripsi]. Bogor (ID): Institut Pertanian Bogor.

Smallman R, Bishop R. 1999. Modern Physics Metallurgy and Materials Engineering. Oxford (GB): Butterworth-Heinemann.

Yan T, Zheng F, Yu Y, Qin S, Liu H, Wang J, Yu D. 2011. Formation mechanism of black LiTaO3 single crystal through chemical reduction. Journal of Applied Crystallography. 44(1): 158-162. http://doi.org/fqfbp3




DOI: https://doi.org/10.18343/jipi.21.3.177

View JIPI Stats

 

   Creative Commons License

This journal is published under the terms of the Creative Commons Attribution-NonCommercial 4.0 International License.

Editorial Office: Institute for Research and Community Services (LPPM), Andi Hakim Nasoetion Building, 5th Floor, Jl. Raya Darmaga, IPB Darmaga Campus, Bogor, West Java, Indonesia 16680, Telp/Fax: +62251-8622323, email: jipi-lppm@apps.ipb.ac.id; jipi-lppm@ipb.ac.id